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Preparation and Wear Resistance of TiBC, TiBN, SiNX Single Layer Film and TiBC-SiNX and TiBN-SiNX Double Layer Film by Thermal Plasma CVD
Fuji, Yusuke, Shimada, Shiro, Kiyono, HajimeVolume:
54
Year:
2007
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.54.287
File:
PDF, 1.39 MB
2007