Measurement of CF3 and CF2 Radical Densities in a Hollow...

Shinku 1999 Vol. 42; Iss. 7

Measurement of CF3 and CF2 Radical Densities in a Hollow Cathode DC CF4 Plasma.

FUJIOKA, Hiroyuki, MASHINO, Souichi, AIKYO, Satoshi, GOTO, Miki, ARAI, Toshihiko
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Volume:
42
Year:
1999
Journal:
SHINKU
DOI:
10.3131/jvsj.42.647
File:
PDF, 587 KB
1999
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