CONTROL OF CRYSTALLINITY AND MICROSTRUCTURE OF Co-Cr FILMS BY CLUSTER FORMATION IN AN OPPOSING TARGET SPUTTERING
KADOKURA, Sadao, NAOE, MasahikoVolume:
15
Year:
1991
Language:
english
Journal:
Journal of the Magnetics Society of Japan
DOI:
10.3379/jmsjmag.15.s2_893
File:
PDF, 603 KB
english, 1991