High-rate reactive-ECR-sputter-deposition of Ni-Zn ferrite...

Journal of the Magnetics Society of Japan 2004 Vol. 28; Iss. 5

High-rate reactive-ECR-sputter-deposition of Ni-Zn ferrite thin films using conic sputtering target

Yamamoto, S., Ogita, T., Kurisu, H., Matsuura, M., Shimosato, Y., Okada, S.
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Volume:
28
Year:
2004
Journal:
Journal of the Magnetics Society of Japan
DOI:
10.3379/jmsjmag.28.703
File:
PDF, 410 KB
2004
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