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High Temperature Behavior of TiN Film Formed by Reactive Ion Plating.
MORIYA, Shigeru, SUGANUMA, Eiichi, SATO, NoboruVolume:
45
Year:
1994
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.45.786
File:
PDF, 2.21 MB
1994