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Fine Grain Diamond Film Synthesis Using Pulse Microwave Plasma CVD.
SAKAMOTO, Yukihiro, USHIKUBO, Koji, TAKAYA, MatsufumiVolume:
47
Year:
1996
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.47.548
File:
PDF, 1.01 MB
1996