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Preparation of Thin-Films by Wet Method-Their Structure and Properties. SiO2 Film Deposited by Liquid Phase Deposition Method for Electronic Devices.
SAKAI, YasutoVolume:
49
Year:
1998
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.49.35
File:
PDF, 900 KB
1998