Surface Technology for the 21st Century. Fusion Bonding of Si Wafers and Fabrication of Check Valves for Micropumps.
MAKINO, Eiji, SHIBATA, TakayukiVolume:
52
Year:
2001
Language:
english
Journal:
Journal of the Surface Finishing Society of Japan
DOI:
10.4139/sfj.52.125
File:
PDF, 2.96 MB
english, 2001