Nanometer Scale Mechanical Properties of DLC Films Deposited by Filtered Cathodic Vadilum Arc Ion-plating Method (FCVA)
MIYAKE, Shojiro, SAITO, Tadashi, YU, Keqing, MIKAMI, Takashi, OGATA, KiyoshiVolume:
55
Year:
2004
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.55.669
File:
PDF, 1.25 MB
2004