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Micromachining of Electrode Patterns for Electrochemical Processes on a Chip-Based System
SHIBATA, Takayuki, KOIBUCHI, Hirobumi, KAWASHIMA, Takahiro, KUBOTA, Toshio, MINETA, Takashi, MAKINO, EijiVolume:
57
Year:
2006
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.57.434
File:
PDF, 630 KB
2006