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Influence on Microstructure of BCN Films by Thermal Annealing in Air
KIM, Jongduk, NAKAO, Setsuo, CHOI, Junho, MIYAKE, ShojiroVolume:
57
Year:
2006
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.57.722
File:
PDF, 702 KB
2006