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Development of New Magnetic Abrasives by Using Electroless Composite Coatings and Its Application to the Post CMP Technology
HANZAWA, Keiko, YOSHIHARA, Sachio, SHIRAKASHI, TakashiVolume:
58
Year:
2007
Journal:
Journal of The Surface Finishing Society of Japan
DOI:
10.4139/sfj.58.366
File:
PDF, 696 KB
2007