Atomic layer deposition of lanthanum oxide with...

Atomic layer deposition of lanthanum oxide with heteroleptic cyclopentadienyl-amidinate lanthanum precursor - Effect of the oxygen source on the film growth and properties

Seppälä, Sanni, Niinistö, Jaakko, Mattinen, Miika, Mizohata, Kenichiro, Räisänen, Jyrki, Noh, Wontae, Ritala, Mikko, Leskelä, Markku
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Volume:
660
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.06.011
Date:
August, 2018
File:
PDF, 2.07 MB
english, 2018
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