Effects of bias pulse frequencies on reactively sputter deposited NbO x films
Lorenz, Roland, O'Sullivan, Michael, Fian, Alexander, Sprenger, Dietmar, Lang, Bernhard, Mitterer, ChristianVolume:
660
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.06.040
Date:
August, 2018
File:
PDF, 10.65 MB
english, 2018