Equilibrium Concentrations of SiHCl3 and SiCl4 in SiCl4–H2...

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Equilibrium Concentrations of SiHCl3 and SiCl4 in SiCl4–H2 System for Hydrogenation of SiCl4 to SiHCl3

Zhou, Yang-min, Fand, Wen-bao, Li, Ya-guang, Nie, Zhi-feng, Ma, Wen-hui, Dai, Yong-nian, Hou, Yan-qing
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Volume:
50
Year:
2017
Language:
english
DOI:
10.1252/jcej.16we321
File:
PDF, 1.29 MB
english, 2017
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