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Use of optical emission spectroscopy for determining the number concentration of chlorine atoms in a chlorine-oxygen plasma
A. E. Skorodumov, D. V. Sitanov, V. I. SvettsovVolume:
34
Language:
english
Pages:
3
DOI:
10.1007/bf02762688
Date:
September, 2000
File:
PDF, 274 KB
english, 2000