Piezoelectric-driven Turntable with High Positioning Accuracy (2nd Report)
TOJO, Toru, SUGIHARA, Kazuyoshi, SAITO, SusumuVolume:
55
Year:
1989
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.55.2181
File:
PDF, 3.57 MB
1989