Thermal relaxation of residual stresses in TiN films...

International Journal of Materials Research (formerly Zeitschrift fuer Metallkunde) 2006 / 12 Vol. 97; Iss. 12

Thermal relaxation of residual stresses in TiN films deposited by arc ion plating

Matsue, Tatsuya, Hanabusa, Takao, Ikeuchi, Yasukazu
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Volume:
97
Language:
english
Journal:
International Journal of Materials Research
DOI:
10.3139/146.101397
Date:
December, 2006
File:
PDF, 309 KB
english, 2006
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