Embedded AlN/GaN multi-layer for enhanced crystal quality...

Embedded AlN/GaN multi-layer for enhanced crystal quality and surface morphology of semi-polar (11-22) GaN on m-plane sapphire

Omar, Al-Zuhairi, Shuhaimi, Ahmad, Makinudin, Abdullah Haaziq Ahmad, Abdul Khudus, Muhammad I.M., Supangat, Azzuliani
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Volume:
86
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.06.014
Date:
November, 2018
File:
PDF, 2.03 MB
english, 2018
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