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Growth of Gaseous Macromolecules in the Downstream Region of Perfluorocompounds Plasmas-Observation, Reaction Mechanism, Thin Film Formation-
FURUYA, Kenji, YUKITA, Shinobu, OKUMURA, Hiroshi, NAKANISHI, Ryoichi, MAKITA, Makoto, HARATA, AkiraVolume:
49
Year:
2006
Journal:
Shinku
DOI:
10.3131/jvsj.49.195
File:
PDF, 277 KB
2006