Design of second-order 121.6-nm narrowband minus filters using asymmetrically apodized thickness modulation
Wang, Xiaodong, Chen, Bo, Huo, Tonglin, Zhou, HongjunVolume:
124
Language:
english
Journal:
Applied Physics B
DOI:
10.1007/s00340-018-7010-1
Date:
July, 2018
File:
PDF, 1.88 MB
english, 2018