![](/img/cover-not-exists.png)
[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Deep Trench Doping by Plasma Immersion Ion Implantation in Silicon
Nizou, S., Vervisch, V., Etienne, H., Ziti, M., Torregrosa, F., Roux, L., Roy, M., Alquier, D.Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401501
File:
PDF, 223 KB
english, 2006