[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Basic Aspects of the Formation and Activation of Boron Junctions Using Plasma Immersion Ion Implantation.
Zschätzsch, G., Vandervorst, W., Hoffmann, T., Goossens, J., Everaert, J.-L., del Agua Borniquel, J. I., Poon, T., Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
Language:
english
DOI:
10.1063/1.3033662
File:
PDF, 1.53 MB
english, 2008
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