![](/img/cover-not-exists.png)
Fabrication of a flexible polyimide-based electrostatically actuated MEMS relay
Liu, Junshan, Shu, Zhen, Wang, Chao, Shan, Han, Yin, Penghe, Zhang, Fengtian, Zhang, Yue, Xiong, Zhuang, Du, Liqun, Tang, Bin, Xu, ZhengLanguage:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aacd2b
Date:
June, 2018
File:
PDF, 715 KB
english, 2018