Collimated Magnetron Sputter Deposition for Mirror Coatings

X-Ray Optics and Instrumentation 2008 Vol. 2008

Collimated Magnetron Sputter Deposition for Mirror Coatings

Vickery, Anette, Jensen, Carsten P., Christensen, Finn E., Steenstrup, Mads Peter
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Volume:
2008
Year:
2008
Language:
english
Journal:
X-Ray Optics and Instrumentation
DOI:
10.1155/2008/792540
File:
PDF, 1.27 MB
english, 2008
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