Direct Current Magnetron Glow Discharge Plasma...

Direct Current Magnetron Glow Discharge Plasma Characteristics Study for Controlled Deposition of Titanium Nitride Thin Film

Borah, Sankar Moni
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Volume:
2013
Year:
2013
Language:
english
Journal:
Journal of Materials
DOI:
10.1155/2013/852859
File:
PDF, 1.56 MB
english, 2013
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