Spectral Monitoring CH/C 2...

Journal of Nanomaterials 2015 Vol. 2015

Spectral Monitoring CH/C 2 Ratio of Methane Plasma for Growing Single-Layer Graphene on Cu

Chan, Shih-Hao, Liao, Shih-Fang, Chen, Hung-Pin, Wei, Hung-Sen, Chen, Sheng-Hui, Lee, Cheng-Chung, Kuo, Chien-Cheng
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Volume:
2015
Year:
2015
Language:
english
Journal:
Journal of Nanomaterials
DOI:
10.1155/2015/423237
File:
PDF, 1.94 MB
english, 2015
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