Development of Evaluation Method for Geometrical Characterization of Polishing Pad Surface Texture Based on Contact Image Analysis Using Image Rotation Prism
UNEDA, Michio, OKABE, Kenji, MORIYA, Norihiko, SHIBUYA, Kazutaka, ISHIKAWA, Ken-ichiVolume:
76
Year:
2010
Journal:
Journal of the Japan Society for Precision Engineering
DOI:
10.2493/jjspe.76.1276
File:
PDF, 9.33 MB
2010