Three-dimensional in situ electron beam lithography using water ice
Hong, Yu, Zhao, Ding, Liu, Dongli, Ma, Binze, Yao, Guangnan, Li, Qiang, Han, Anpan, Qiu, MinLanguage:
english
Journal:
Nano Letters
DOI:
10.1021/acs.nanolett.8b01857
Date:
June, 2018
File:
PDF, 2.11 MB
english, 2018