[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Inline SEM imaging of buried defects using novel electron detection system: DI: Defect inspection and reduction
Jain, Abhinav, Sheridan, John G., Levitov, Felix, Aristov, Victor, Yasharzade, Shay, Nguyen, HoangYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373177
File:
PDF, 1.25 MB
english, 2018