Particulate Science and Technology in the Engineering of...

KONA Powder and Particle Journal 2008 Vol. 26

Particulate Science and Technology in the Engineering of Slurries for Chemical Mechanical Planarization

Raghavan, Srini, Keswani, Manish, Jia, Renhe
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Volume:
26
Year:
2008
Language:
english
Journal:
KONA Powder and Particle Journal
DOI:
10.14356/kona.2008010
File:
PDF, 544 KB
english, 2008
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