P-19: Effect of RTP Annealing Using UV and DUV Light on the...

SID Symposium Digest of Technical Papers 2018 / 05 Vol. 49; Iss. 1

P-19: Effect of RTP Annealing Using UV and DUV Light on the Properties of the Al-IZTO TFTs

Nam, Yunyong, Yang, Jong-Heon, Jeong, Pilseong, Kwon, Oh-Sang, Pi, Jae-Eun, Kim, Hee-Ok, Cho, Sung Haeng, Hwang, Chi-Sun, Ji, Sanghyun, Park, Sang-Hee Ko
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Volume:
49
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.12137
Date:
May, 2018
File:
PDF, 1.34 MB
english, 2018
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