Photonic Damascene process for low-loss, high-confinement silicon nitride waveguides
Pfeiffer, Martin Hubert Peter, Herkommer, Clemens, Liu, Junqiu, Morais, Tiago, Zervas, Michael, Geiselmann, Michael, Kippenberg, TobiasYear:
2018
Language:
english
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
DOI:
10.1109/JSTQE.2018.2808258
File:
PDF, 53.71 MB
english, 2018