Piezoelectric thick film fabricated with aerosol deposition...

Japanese Journal of Applied Physics 2018 / 07 Vol. 57; Iss. 7S1

Piezoelectric thick film fabricated with aerosol deposition and its application to piezoelectric devices

Akedo, Jun, Park, Jae-Hyuk, Kawakami, Yoshihiro
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Volume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.07LA02
Date:
July, 2018
File:
PDF, 2.21 MB
english, 2018
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