In situ study of porous silicon thin films...

Semiconductor Science and Technology 2018 / 08 Vol. 33; Iss. 8

In situ study of porous silicon thin films thermal oxidation by pulsed laser photoacoustics

Ruíz Pérez, Atzin David, de la Mora, M B, Benítez, J L, Castañeda-Guzmán, R, Reyes-Esqueda, Jorge Alejandro, Villagrán-Muniz, M
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Volume:
33
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aacbe4
Date:
August, 2018
File:
PDF, 1.17 MB
english, 2018
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