Optimization of 150 mm 4H SiC Substrate Crystal Quality
Manning, Ian, Chung, Gil Yong, Sanchez, Edward, Yang, Yu, Guo, Jian Qiu, Goue, Ouloide, Raghothamachar, Balaji, Dudley, MichaelVolume:
924
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.924.11
Date:
June, 2018
File:
PDF, 1.34 MB
english, 2018