Diagnostics of a low-pressure ICP discharge using a magnetic sector mass analyser
Kolodko, D V, Kaziev, A V, Ageychenkov, D G, Pisarev, A AVolume:
747
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/747/1/012018
Date:
September, 2016
File:
PDF, 1.25 MB
english, 2016