[IEEE 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2018.4.30-2018.5.3)] 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - BOX breakdown: A novel defect mode in a 14nm SOI FinFET technology
Rettmann, Ryan, McCormack, Tim, Patterson, Oliver D., Lin, Hong, Nummy, Karen, Poindexter, Dan, Parries, PaulYear:
2018
Language:
english
DOI:
10.1109/ASMC.2018.8373220
File:
PDF, 593 KB
english, 2018