Characterization on Contacting Surfaces of MEMS Electrostatic Switches by SEM, EDXA, and XPS
Afinogenov, I. A., Zeltser, I. A., Trunin, E. B., Tolstoguzov, A.Volume:
2015
Year:
2015
Language:
english
Journal:
Advances in Materials Science and Engineering
DOI:
10.1155/2015/679313
File:
PDF, 4.28 MB
english, 2015