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Linear magnetron HiPIMS high deposition rate magnet pack
McLain, Jake, Raman, Priya, Patel, Dhruval, Spreadbury, Randall, Uhlig, Jan, Shchelkanov, Ivan, Ruzic, D.N.Volume:
155
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2018.06.023
Date:
September, 2018
File:
PDF, 3.10 MB
english, 2018