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[IEEE 2018 China Semiconductor Technology International Conference (CSTIC) - Shanghai (2018.3.11-2018.3.12)] 2018 China Semiconductor Technology International Conference (CSTIC) - Study on planarization performance of spin on hardmask
Yun, Huichan, Kim, Jinhyung, Kim, Yoona, Jeong, Seulgi, Lim, Sanghak, Yu, Jeong YunYear:
2018
Language:
english
DOI:
10.1109/CSTIC.2018.8369206
File:
PDF, 202 KB
english, 2018