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Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

Ishibashi, Kentaro, Goto, Hiroshi, Mizuno, Jun, Shoji, Shuichi
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Volume:
2012
Year:
2012
Language:
english
Journal:
Journal of Nanotechnology
DOI:
10.1155/2012/103439
File:
PDF, 6.61 MB
english, 2012
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