Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting
Ishibashi, Kentaro, Goto, Hiroshi, Mizuno, Jun, Shoji, ShuichiVolume:
2012
Year:
2012
Language:
english
Journal:
Journal of Nanotechnology
DOI:
10.1155/2012/103439
File:
PDF, 6.61 MB
english, 2012