Modeling of a High Force Density Fishbone Shaped Electrostatic Comb Drive Microactuator
Megat Hasnan, Megat Muhammad Ikhsan, Mohd Sabri, Mohd Faizul, Mohd Said, Suhana, Nik Ghazali, Nik NazriVolume:
2014
Year:
2014
Language:
english
Journal:
The Scientific World Journal
DOI:
10.1155/2014/912683
File:
PDF, 2.52 MB
english, 2014