Micromachining of 4H-SiC using femtosecond laser
Zhang, Ru, Huang, Chuanzhen, Wang, Jun, Zhu, Hongtao, Yao, Peng, Feng, ShaochuanLanguage:
english
Journal:
Ceramics International
DOI:
10.1016/j.ceramint.2018.06.245
Date:
June, 2018
File:
PDF, 1.98 MB
english, 2018