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Full custom MEMS design: A new method for the analysis of motion-dependent parasitics
Hald, Axel, Herzogenrath, Pekka, Scheible, Jürgen, Lienig, Jens, Seelhorst, Johannes, Brandl, PeterLanguage:
english
Journal:
Integration
DOI:
10.1016/j.vlsi.2018.02.004
Date:
March, 2018
File:
PDF, 5.79 MB
english, 2018