The Combination of Equipment Scale and Feature Scale Models...

VLSI Design 1998 Vol. 6; Iss. 1-4

The Combination of Equipment Scale and Feature Scale Models for Chemical Vapor Deposition Via a Homogenization Technique

Gobbert, Matthias K., Cale, Timothy S., Ringhofer, Christian A.
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Volume:
6
Year:
1998
Language:
english
Journal:
VLSI Design
DOI:
10.1155/1998/24073
File:
PDF, 1.60 MB
english, 1998
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