Simulation and Analysis of GaN Wafer Bowing on Sapphire...

Advances in Condensed Matter Physics 2013 Vol. 2013

Simulation and Analysis of GaN Wafer Bowing on Sapphire Substrate

Bin, Wang, Yu-xuan, Qu, Shi-gang, Hu, Zhi-jun, Tang, Jin, Li, Ying-lu, Hu
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Volume:
2013
Year:
2013
Language:
english
Journal:
Advances in Condensed Matter Physics
DOI:
10.1155/2013/465498
File:
PDF, 1.37 MB
english, 2013
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