![](/img/cover-not-exists.png)
Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles
Ruano, Manuel, Martínez, Lidia, Huttel, YvesVolume:
2013
Year:
2013
Language:
english
Journal:
Dataset Papers in Science
DOI:
10.1155/2013/597023
File:
PDF, 2.65 MB
english, 2013