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Application of Ellipsometry to Control the Plasmachemical Synthesis of Thin TiONx Layers
Dultsev, F. N., Kolosovsky, E. A.Volume:
2015
Year:
2015
Language:
english
Journal:
Advances in Condensed Matter Physics
DOI:
10.1155/2015/709308
File:
PDF, 1.70 MB
english, 2015