Enhanced Sample Preparation of Cu Low-k Semiconductors via...

Microscopy Today 2004 / 01 Vol. 12; Iss. 1

Enhanced Sample Preparation of Cu Low-k Semiconductors via Mechanical Polishing and Ion Beam Etching

Roberts, Shane, Flatoff, Daniel
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Volume:
12
Language:
english
Journal:
Microscopy Today
DOI:
10.1017/S1551929500051828
Date:
January, 2004
File:
PDF, 5.67 MB
english, 2004
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